Mobile QR Code QR CODE : The Transactions P of the Korean Institute of Electrical Engineers
The Transactions P of the Korean Institute of Electrical Engineers

Korean Journal of Air-Conditioning and Refrigeration Engineering

ISO Journal TitleTrans. P of KIEE
  • Indexed by
    Korea Citation Index(KCI)

Journal Search

  1. Home
  2. Archive
  3. 2010-12(Vol.59 No.04)
PDF INFO
Title Development of Hand-Held Type Sheet Resistance Meter Based on a Dual-Configuration Four-Point Probe Method
Authors 강전홍(Kang, Jeon-Hong) ; 유광민(Yu, Kwang-Min) ; 김완섭(Kim, Wan-Seop)
Page pp.423-427
ISSN 1229-800X
Keywords Four-Point Probe ; Single- & Dual-Configuration ; Sheet Resistance ; Accuracy ; Uncertainty
Abstract Portable sheet resistance-measuring instrument using the dual-configuration Four-Point Probe method is developed for the purpose of precisely measuring the sheet resistance of conducting thin films. While single-configuration Four-Point Probe method has disadvantages of applying sample size, shape and thickness corrections for a probe spacing, the developed instrument has advantages of no such corrections, little edge effects and measuring simply and accurately the sheet resistance between 0.2\Omega/sq and 2k\Omega/sq.